Co-deposition of silver nanoclusters and sputtered alumina for sensor devices

Thin Solid Films

Volumn 515, Issue 20-21, 2007, Pages 7790-7797

  Schultes, Guenter ^a   Schmidt, Michael ^a   Truar, Marcel ^a   Goettel, Dirk ^a   Freitag Weber, Olivia ^a   Werner, Ulf ^b  

^a Hochschule fur Technik und Wirtschaft des Saarlandes   (Germany)

^b INM LEIBNIZ INSTITUTE FOR NEW MATERIALS   (Germany)

Author keywords

Cermets; Cluster source; Co deposition; Embedded clusters; Granular films; Heterogeneous thin film; Piezoresistivity; Silver nanocluster; TEM; Thermal reduction of silver oxides

Indexed keywords

ALUMINA; CERMETS; ELECTRIC CONDUCTIVITY; SENSITIVITY ANALYSIS; SENSORS; SILVER; SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY;

CLUSTER SOURCES; EMBEDDED CLUSTERS; GRANULAR FILMS; HETEROGENEOUS THIN FILMS; SILVER NANOCLUSTERS; THERMAL REDUCTION;

NANOCLUSTERS;

EID: 34547670164     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.183     Document Type: Article

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