High sensitive strain microsensor based on dielectric matrix with metal nanoparticles

Materials Research Society Symposium - Proceedings

Volumn 459, Issue , 1997, Pages 261-265

  Konovalov, I A ^a   Fedorovich, R D ^a   Nepijko, S A ^a   Viduta, L V ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIELECTRIC FILMS; ELECTRIC RESISTANCE; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; MORPHOLOGY; NANOSTRUCTURED MATERIALS; STRAIN MEASUREMENT; SUBSTRATES; THERMAL EFFECTS;

DIELECTRIC MATRICES; METAL NANOPARTICLES; STRAIN COEFFICIENTS; STRAIN MICROSENSORS;

SENSORS;

EID: 0030647991     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)