The fabrication of microfluidic structures by means of full-wafer adhesive bonding using a poly(dimethylsiloxane) catalyst

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1710-1714

  Samel, Björn ^a   Chowdhury, M Kamruzzaman ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; MICROFABRICATION; MICROSTRUCTURE; SILICON WAFERS; SPIN COATING;

FULL-WAFER ADHESIVE BONDING; MICROFLUIDIC STRUCTURES;

MICROFLUIDICS;

EID: 34547655760     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/038     Document Type: Article

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