Ultralow-dielectric-constant optical thin films built from magnesium oxyfluoride vesicle-like hollow nanoparticles

Nature Materials

Volumn 6, Issue 8, 2007, Pages 572-575

  Grosso, David ^a   Boissière, Cédric ^a   Sanchez, Clément ^a  

^a UNIVERSITÉ PIERRE ET MARIE CURIE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNESIUM COMPOUNDS; MICROOPTICS; NANOPARTICLES; PERMITTIVITY; PHOTONIC CRYSTALS; REFRACTIVE INDEX;

LIQUID DEPOSITION; SMART DEVICES;

THIN FILMS;

EID: 34547619183     PISSN: 14761122     EISSN: 14764660     Source Type: Journal    
DOI: 10.1038/nmat1950     Document Type: Article

References (14)

1. Maex, K. etal. Low dielectric constant materials for microdectronics. J. Appl. Phys. 93, 8793-8841 (2003).
2. 2 thin films by a trifluoroacetic add method. Thin Solid Films 304, 252-255 (1997).
3. Grosso, D. et al. Two-dimensional hexagonal mesoporous silica thin films prepared from block copolymers: Detailed characterization and formation mechanism. Chem. Mater. 13, 1848-1856 (2001).
4. Konjhodzic, D., Bretinger, H. & Marlow, F. Structure and properties of low-n mesoporous silica films for optical applications. Thin Solid films 495, 333-337 (2006).
5. 2 nanorods. Opt. Lett. 31, 601-603 (2006).
6. Navamathavan, R., Choi, C. K. & Lee, K. M. Studies of low-dielectric constant SiOC(-H) thin films deposited by using MTES/0-2-PECVD. J. Korean Phys. Soc. 48, 1675-1679 (2006).
7. Easwarakhanthan, T., Beyssen, D., Le Brizoual, L. & Bougdira, J. J. Vac. Sci. Technol. 24, 1036-1043 (2006).
8. Grosso, D. et al. Fundamentals of mesostructuring through evaporation-induced self-assembly. Adv. Funcl. Mater. 14, 309-322 (2004).
9. Matheron, M. et al. Mesoporous 3D-hexagonal organosilicate films: Post-synthesis grafting versus direct synthesis. Thin Solid Films 495, 175-179 (2006).
10. Matheron, M. et al. Ordered mesoporous organosilica films. Stud. Surf. Sci. Catal. 156, 327-334 (2005).
11. Grosso, D., Boissiere, C. & Sanchez, C. Oxyfluorures poreux nanostructurés. French patent No. FR05/11.659.
12. Boissiere, C. et al. Porosity and mechanical properties of mesoporous thin films assessed by environmental ellipsometric porosimetry. Langmuir 21, 12362-12371 (2005).
13. Tada, M., Fujihara, S. & Kimura, T. Sol-gel processing and characterization of alkaline earth and rare-earth fluoride thin films. J. Mater. Res. 14, 1610-1616 (1999).
14. Fujihara, S., Tada, M. & Kimura, T. Controlling factors for the conversion of trifluooroacetate sols into thin metal fluoride coatings. J. Sol-Gel Sci. Technol. 19, 311-314 (2000).