Fabrication of high performance low temperature poly-silicon backplanes on metal foil for flexible active-matrix organic light emission diode displays

Thin Solid Films

Volumn 515, Issue 19 SPEC. ISS., 2007, Pages 7428-7432

  Templier, François ^a   Aventurier, Bernard ^a   Demars, Patrick ^a   Botrel, Jean Louis ^a   Martin, Patrick ^a  

^a CEA LETI   (France)

Author keywords

Active matrix; Flexible; LTPS; Metal; OLED; Poly silicon; Thin film transistor

Indexed keywords

ELECTRIC INSULATORS; FIELD EFFECT SEMICONDUCTOR DEVICES; METAL FOIL; MOS DEVICES; ORGANIC LIGHT EMITTING DIODES (OLED); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THRESHOLD ELEMENTS;

HIGH TEMPERATURE BUDGET; SELF ALIGNED LTPS PROCESS;

POLYSILICON;

EID: 34547595553     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.197     Document Type: Article

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