High Performance Polysilicon Thin Film Transistor Circuits On Flexible Stainless Steel Foils

Materials Research Society Symposium - Proceedings

Volumn 769, Issue , 2003, Pages 47-52

  Afentakis, Themis ^a   Hatalis, Miltiadis K ^a   Voutsas, Apostolos T ^b   Hartzell, John W ^b  

^a Lehigh University   (United States)

^b SHARP LABORATORIES OF AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CMOS INTEGRATED CIRCUITS; CRYSTALLIZATION; DIELECTRIC MATERIALS; DIGITAL INTEGRATED CIRCUITS; METAL FOIL; MICROELECTRONICS; PHOTOLITHOGRAPHY; SHIFT REGISTERS; STAINLESS STEEL; SURFACE ROUGHNESS; THIN FILM TRANSISTORS;

MICROELECTRONIC FABRICATION; ROLL-TO-ROLL PROCESSING;

POLYSILICON;

EID: 1542274565     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-769-h2.5     Document Type: Conference Paper

References (9)

1. S.D. Theiss, S. Wagner, IEEE Elec. Dev. Lett., Vol. 17, p. 578, (1996)
2. th Ann. Dev. Res. Conf. Dig., p. 58, (1997)
3. S. Theiss, C. Wu, M. Lu, J. Sturm, S. Wagner, MRS 1997 Spring Meeting Proc., 471, p.21, (1997)
4. Tsu Jae King, Inf. Disp., Vol. 17, p. 27, (2001)
5. F. Matsukawa, H. Arai, S. Hayashi, SAE Spec. Publ., p. 1, (1985)
6. M. Ikeda, Y. Mizutani, S. Ashida, K. Yamada, IEICE Trans. On Elec., Vol. E-83C, No. 10, p. 1584, (2000)
7. K. Kato et. al., IEICE Transactions on Electronics, Vol. E80-C, No. 2, pp320-326, (1997)
8. T. Afentakis, M. Stewart, R. Howell, M. Halalis, SID Digest, Vol. 33, pp. 538-541, (2000)
9. T. Afentakis, M. Hatalis, SPIE Proceedings, Vol. 4295, pp. 95-101, (2001)