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Volumn 62, Issue 6-7 SPEC. ISS., 2007, Pages 554-557
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Modeling of glancing incidence X-ray for depth profiling of thin layers
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Author keywords
Depth profiling; Glancing incidence diffraction; Gold; Simulation; Thin film; XRD
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Indexed keywords
COMPUTER SIMULATION;
MATHEMATICAL MODELS;
X RAY ABSORPTION SPECTROSCOPY;
X RAY DIFFRACTION;
FRESNEL COEFFICIENTS;
GLANCING INCIDENCE DIFFRACTION;
X RAY REFLECTIVITY (XRR);
POLYCRYSTALLINE MATERIALS;
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EID: 34547559061
PISSN: 05848547
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sab.2007.02.012 Document Type: Article |
Times cited : (18)
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References (10)
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