Modeling of glancing incidence X-ray for depth profiling of thin layers

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 62, Issue 6-7 SPEC. ISS., 2007, Pages 554-557

  Colombi, Paolo ^a   Zanola, Paolo ^a   Bontempi, Elza ^a   Depero, Laura E ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Depth profiling; Glancing incidence diffraction; Gold; Simulation; Thin film; XRD

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL MODELS; X RAY ABSORPTION SPECTROSCOPY; X RAY DIFFRACTION;

FRESNEL COEFFICIENTS; GLANCING INCIDENCE DIFFRACTION; X RAY REFLECTIVITY (XRR);

POLYCRYSTALLINE MATERIALS;

EID: 34547559061     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2007.02.012     Document Type: Article

References (10)

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