An examination of trace surface on diamond-like carbon film after ball-on disk measurement

Thin Solid Films

Volumn 515, Issue 19 SPEC. ISS., 2007, Pages 7560-7565

  Choi, Won Seok ^a   Park, Mungi ^b   Hong, Byungyou ^a  

^a Sungkyunkwan University   (South Korea)

^b LG Display Co Ltd   (South Korea)

Author keywords

Amorphous materials; Chemical vapor deposition (CVD); Hydrocarbons; Raman scattering; Tribology

Indexed keywords

HYDROGENATION; METHANE; OPTICAL MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE ANALYSIS; TRACE ANALYSIS; TRIBOLOGY;

BALL ON DISK (BOD) MEASUREMENT; FRICTION COEFFICIENTS; RAMAN MAPPING;

DIAMOND LIKE CARBON FILMS;

EID: 34547556626     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.196     Document Type: Article

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