Titanium oxidation by microwave discharge oxygen plasma and relationship with plasma parameters

Journal of Advanced Oxidation Technologies

Volumn 10, Issue 2, 2007, Pages 253-259

  Kakizaka, S ^a   Sakamoto, T ^a   Matsuura, H ^a   Akatsuka, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Actinometry; Microwave oxygen plasma; Oxygen atom density; Plasma diagnostics; Plasma oxidation

Indexed keywords

ATOMS; ELECTRON TEMPERATURE; FREE RADICALS; MICROWAVES; OXIDATION; OXIDE MINERALS; OXYGEN; PLASMA DEVICES; PLASMA DIAGNOSTICS; TITANIUM DIOXIDE;

ACTINOMETRY; DISCHARGE CONDITIONS; DISCHARGE PRESSURES; OXYGEN ATOM; OXYGEN PLASMAS; PLASMA OXIDATION; ROTATIONAL TEMPERATURE; VIBRATIONAL TEMPERATURE;

ELECTRIC DISCHARGES;

EID: 34547553658     PISSN: 12038407     EISSN: None     Source Type: Journal    
DOI: 10.1515/jaots-2007-0205     Document Type: Article

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