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Volumn 44, Issue 7, 2001, Pages 661-666
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Effects of ion irradiation on formation of TiO2 thin films by reactive sputtering in electron cyclotron resonance plasma source
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL STRUCTURE;
FILM GROWTH;
ION BOMBARDMENT;
IONS;
IRRADIATION;
MAGNETIC FIELD EFFECTS;
PARAMAGNETIC RESONANCE;
PERMANENT MAGNETS;
PLASMA DEVICES;
SLOT ANTENNAS;
SPUTTERING;
TITANIUM OXIDES;
ANATASE;
DIVERGENT MAGNETIC FIELDS;
ION IRRADIATION;
PLASMA SHUTTER;
REACTIVE SPUTTERING;
RUTILE;
THIN FILMS;
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EID: 0034797818
PISSN: 05598516
EISSN: None
Source Type: Journal
DOI: 10.3131/jvsj.44.661 Document Type: Article |
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Times cited : (2)
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References (8)
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