Application of electron cyclotron resonance plasma in arched magnetic mirrors to deposition of TiO2 thin films

Review of Scientific Instruments

Volumn 73, Issue 2 II, 2002, Pages 843-

  Honbo, E ^a   Miyata, M ^b   Kato, Y ^b   Ishii, S ^b  

^a TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^b TOYAMA PREFECTURAL UNIVERSITY   (Japan)

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EID: 0036473123     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1431708     Document Type: Conference Paper

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