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Volumn 192-193, Issue , 2007, Pages 607-612

Study of the temperature and stress in nanoscale ductile mode cutting of silicon using molecular dynamics simulation

Author keywords

Cutting force; Ductile mode cutting; Molecular dynamics; Silicon wafer; Stress; Temperature

Indexed keywords

BRITTLENESS; CRACK PROPAGATION; CUTTING TOOLS; MOLECULAR DYNAMICS; SHEAR STRESS; SILICON; NANOTECHNOLOGY; SILICON WAFERS; STRESSES; TEMPERATURE;

EID: 34547534678     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.04.028     Document Type: Article
Times cited : (93)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.