Study of electrical characteristics of Ge islands MSM photodetector structure grown on Si substrate using conventional methods

Semiconductor Science and Technology

Volumn 22, Issue 8, 2007, Pages 905-910

  Baharin, A ^a   Hashim, M R ^a  

^a SCHOOL OF PHYSICS   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; ENERGY DISPERSIVE X RAY ANALYSIS; GERMANIUM COMPOUNDS; RAMAN SPECTROSCOPY; RAPID THERMAL ANNEALING; THERMAL EVAPORATION;

ANNEALING TIME; METAL-SEMICONDUCTOR- METAL (MSM); MSM PHOTODETECTORS; SECONDARY ELECTRON MICROSCOPY;

PHOTODETECTORS;

EID: 34547478697     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/8/014     Document Type: Article

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