Unveiling the electromigration physics of ULSI interconnects through statistics

Semiconductor Science and Technology

Volumn 22, Issue 8, 2007, Pages 941-946

  Tan, Cher Ming ^a   Raghavan, Nagarajan ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; INTERCONNECTION NETWORKS; STATISTICAL METHODS; ULSI CIRCUITS;

ELECTROMIGRATION PHYSICS; INCUBATION; STATISTICAL DISTRIBUTION; ULSI INTERCONNECTS;

ELECTROMIGRATION;

EID: 34547420630     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/8/020     Document Type: Article

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