Characterization of thin-film deposition in a pulsed acrylic acid polymerizing discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 1093-1097

  Voronin, Sergey A ^a   Bradley, James W ^a   Fotea, Catalin ^b   Zelzer, Mischa ^b   Alexander, Morgan R ^b  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b UNIVERSITY OF NOTTINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; MASS SPECTROMETERS; ORGANIC ACIDS; POLYMERIZATION; QUARTZ CRYSTAL MICROBALANCES; X RAY PHOTOELECTRON SPECTROSCOPY;

GAS PHASE PLASMA COMPOSITION; PULSE DURATION; PULSED ACRYLIC ACID POLYMERIZING DISCHARGE; THIN-FILM DEPOSITION;

THIN FILMS;

EID: 34547332652     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2712186     Document Type: Article

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