Texture formation of GeSbTe thin films prepared by multilayer deposition of modulating constituent elements

Applied Physics Letters

Volumn 90, Issue 25, 2007, Pages

  Ie, Sang Yub ^a   Bea, Byung Tack ^a   Ahn, Young Kun ^a   Chang, M Y ^a   You, D G ^a   Cho, M H ^a   Jeong, K ^a   Oh, Jae Hee ^b   Koh, Gwan Hyeob ^b   Jeong, Hongsik ^b  

^a Yonsei University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DISTRIBUTION FUNCTIONS; GERMANIUM COMPOUNDS; MULTILAYER FILMS; STOICHIOMETRY; SUBSTRATES; X RAY DIFFRACTION;

CRYSTALLINE STATE; MODULATED LAYERS; TEXTURE FORMATION;

THIN FILMS;

EID: 34547323795     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2751105     Document Type: Article

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