Strategy for the control of a dual-stage nano-positioning system with a single metrology

2006 IEEE Conference on Robotics, Automation and Mechatronics

Volumn , Issue , 2006, Pages

  Michellod, Yvan ^a   Mullhaupt, Philippe ^a   Gillet, Denis ^a  

^a EPFL   (Switzerland)

Author keywords

Dual input single output; Dual stage; Feedback; Large displacement; Nano positioning; Observer; Piezoelectric; PM stepper motor; Trajectory tracking

Indexed keywords

FEEDBACK CONTROL; NANOTECHNOLOGY; PERMANENT MAGNETS; PIEZOELECTRIC ACTUATORS; STEPPING MOTORS; THREE TERM CONTROL SYSTEMS;

DUAL INPUT SINGLE OUTPUT; LARGE DISPLACEMENT; NANO POSITIONING; TRAJECTORY TRACKING;

TRACKING (POSITION);

EID: 34547299473     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RAMECH.2006.252649     Document Type: Conference Paper

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