Surface characterization of plasma-polymerized cyclohexane thin film

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 938-942

  Choi, Changrok ^a   Yeo, Sanghak ^a   Shon, Hyun Kyong ^b   Kim, Jeong Won ^b   Moon, Dae Won ^b   Jung, Donggeun ^a   Lee, Tae Geol ^b  

^a Sungkyunkwan University   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERIZATION; PRINCIPAL COMPONENT ANALYSIS; SECONDARY ION MASS SPECTROMETRY; SURFACE PROPERTIES; THIN FILMS;

MOLECULAR CROSSLINKING; OXYGEN FUNCTIONAL GROUPS; PLASMA-POLYMERIZED CYCLOHEXANE (PPCHEX);

PLASMAS;

EID: 34547267137     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2743641     Document Type: Article

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