Planar microstructures using modified surface micromachining process

Sensor Letters

Volumn 5, Issue 2, 2007, Pages 387-391

  Bhatt, Vivekanand ^a   Chandra, Sudhir ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

CMP; MEMS; Planar microstructures; RF sputtering; SiO2; Surface micromachining; ZnO

Indexed keywords

CHEMICAL MECHANICAL POLISHING; DEPOSITION; SILICA; SPUTTERING; SURFACE MICROMACHINING; ZINC OXIDE;

PLANAR MICROSTRUCTURES; PLANARIZATION; SURFACE MICROMACHINING PROCESS;

MEMS;

EID: 34547210752     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2007.207     Document Type: Article

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