Periodic sub-micrometric structures using a 3D laser interference pattern

Applied Surface Science

Volumn 253, Issue 19, 2007, Pages 7947-7951

  Salaun M ^a   Joudrier, A L ^a   Audier, M ^a   Pignard, S ^a  

^a LABORATOIRE DES MATÉRIAUX ET DU GÉNIE PHYSIQUE   (France)

Author keywords

Photonic band gap; Photoresist; Sub micrometric periodic structures

Indexed keywords

LASER INTERFEROMETRY; LASER PULSES; PHOTONIC BAND GAP; PHOTORESISTORS; POLARIZATION; ULTRAVIOLET RADIATION;

3D INTERFERENCE; LASER INTERFERENCE; PULSED UV LASER BEAM SOURCES; SUB MICROMETRIC PERIODIC STRUCTURES;

PERIODIC STRUCTURES;

EID: 34447307662     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.162     Document Type: Article

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