Study on Si-SiGe three-dimensional CMOS integrated circuits

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 28, Issue 5, 2007, Pages 681-685

  Hu, Huiyong ^a   Zhang, Heming ^a   Jia, Xinzhang ^a   Dai, Xianying ^a   Xuan, Rongxi ^a  

^a XIDIAN UNIVERSITY   (China)

Author keywords

CMOS; Integrated circuits; Si SiGe; Three dimensional

Indexed keywords

SEMICONDUCTING GERMANIUM COMPOUNDS; THREE DIMENSIONAL;

INTRINSIC PERFORMANCE; PHYSICAL CHARACTERISTICS;

CMOS INTEGRATED CIRCUITS;

EID: 34347262485     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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