Soft magnetic FeCoTaN film cores for new high-frequency CMOS compatible micro-inductors

Journal of Magnetism and Magnetic Materials

Volumn 316, Issue 2 SPEC. ISS., 2007, Pages

  Seemann, K ^a   Leiste, H ^a   Ziebert, C ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

High frequency permeability; Magnetic domain; Micro inductor; Nanocrystalline ferromagnetic thin film; Uniaxial anisotropy

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC INDUCTORS; IRON COMPOUNDS; MAGNETIC DOMAINS; MAGNETIC PERMEABILITY; MAGNETRON SPUTTERING; NANOCRYSTALLINE MATERIALS; REACTIVE ION ETCHING; SOFT MAGNETIC MATERIALS;

HIGH FREQUENCY PERMEABILITY; MICROINDUCTOR; NANOCRYSTALLINE FERROMAGNETIC THIN FILM; UNIAXIAL ANISOTROPY;

MAGNETIC FILMS;

EID: 34250357551     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmmm.2007.03.126     Document Type: Article

References (6)

1. Lee C.-H., Shin D.-H., Ahn D.-H., Nam S.-E., and Kim H.-J. J. Appl. Phys. 85 (1999) 4898
2. Yamaguchi M., Suezawa K., Takahashi Y., Arai K.I., Kikuchi S., Shimada Y., Tanabe S., and Ito K. J. Magn. Magn. Mater. 215-216 (2000) 807
3. Liu F., Ren T., Yang C., Liu L., Wang A.Z., and Yu J. Mater. Lett. 60 (2006) 1403
4. Ma B., Wei F.L., Liu X.X., Xiao C.T., and Yang Z. Mater. Sci. Eng. B 57 (1999) 97
5. Bekker V., Seemann K., and Leiste H. J. Magn. Magn. Mater. 296 (2006) 37
6. Seemann K., Leiste H., and Bekker V. J. Magn. Magn. Mater. 302 (2006) 321