New low-cost fabrication method for micro electro mechanical system microneedles

Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University

Volumn 41, Issue 5, 2007, Pages 589-592

  Jia, Shuhai ^a   Li, Yigui ^b   Zhu, Jun ^c   Sun, Xiao ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b RITSUMEIKAN UNIVERSITY   (Japan)

^c SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Lithography; Micro electro mechanical system (MEMS); Microneedle; Synchrotron radiation

Indexed keywords

GAUSSIAN BEAMS; LIGHT SOURCES; NEEDLES; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

DEVELOPMENT PROCEDURE; MICRONEEDLE; MICRONEEDLE ARRAY; SUPERCONDUCTING COMPACT STORAGE RING;

MEMS;

EID: 34250341795     PISSN: 0253987X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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