Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 260, Issue 1, 2007, Pages 450-454

  Wang, L P ^a   Shao, P G ^a   van Kan, J A ^a   Ansari, K ^a   Bettiol, A A ^a   Pan, X T ^a   Wohland, T ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Lab on a chip; Nanofabrication; Nanofluidics; Proton beam writing; Thermal bonding

Indexed keywords

EMBEDDED SYSTEMS; HYDROPHILICITY; ION BEAMS; MICROFABRICATION; NANOSTRUCTURES; POLYMETHYL METHACRYLATES; PROTONS;

LAB-ON-A-CHIP; PROTON BEAM WRITING; THERMAL BONDING;

NANOFLUIDICS;

EID: 34249915492     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.02.062     Document Type: Article

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