Properties of light-emitting porous silicon photoetched in aqueous HF FeCl3 solution

Journal of Applied Physics

Volumn 101, Issue 10, 2007, Pages

  Xu, Yan Kai ^a   Adachi, Sadao ^a  

^a GUNMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; IRON COMPOUNDS; LIGHT EMISSION; OXIDANTS; PHOTOLUMINESCENCE; SURFACE TOPOGRAPHY;

HF SOLUTION; LIGHT EMITTING POROUS SILICON; OXIDIZING AGENT; ROOT MEAN SQUARES ROUGHNESS;

POROUS SILICON;

EID: 34249895294     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2733752     Document Type: Article

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