Influence of the current applied to the silver target on the structure and the properties of Ag-Cu-O films deposited by reactive cosputtering

Applied Surface Science

Volumn 253, Issue 18, 2007, Pages 7522-7526

  Pierson, J F ^a   Horwat, D ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

Electrical and optical properties; Nanocrystallised silver; Reactive sputtering; Silver copper oxides; Structure

Indexed keywords

ELECTRIC CURRENTS; GLASS; MAGNETRON SPUTTERING; NANOCRYSTALLITES; SUBSTRATES; THIN FILMS;

DEPOSITION CHAMBER; OXYGEN FLOW RATE; REACTIVE COSPUTTERING; SILVER TARGET;

SILVER COMPOUNDS;

EID: 34249877697     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.03.054     Document Type: Article

References (21)

1. Ohring M. The Materials Science of Thin Films (1992), Academic Press, San Diego, CA
2. Bunshah R.F. Handbook of Deposition Technologies for Films and Coatings (1994), Noyes Publications, Park Ridge, NJ
3. Pilloud D., Pierson J.F., Marques A.P., and Cavaleiro A. Surf. Coat. Technol. 180/181 (2004) 352
4. Pierson J.F., Thober-Keck A., and Billard A. Appl. Surf. Sci. 210 (2003) 359
5. JCPDS Powder Diffraction File 83-1665, International Centre for Diffraction Data, Park Lane, Swartmore, PA, USA, 2000.
6. Morgan P.E.D., Partin D.E., Chamberland B.L., and O'Keeffe M. J. Solid State Chem. 121 (1996) 33
7. Li J., Vizkelethy G., Revesz P., Mayer J.W., and Tu K.N. J. Appl. Phys. 69 (1991) 1020
8. von Richthofen A., Domnick R., Cremer R., and Neuschütz D. Thin Solid Films 317 (1998) 282
9. Thobor A., and Pierson J.F. Mater. Lett. 57 (2003) 3676
10. Blobaum K.J., Van Heerden D., Wagner A.J., Fairbrother D.H., and Weihs T.P. J. Mater. Res. 18 (2003) 1535
11. Gomez-Romero P., Tejada-Rosales E.M., and Rosa Palacin M. Angew. Chem. Int. Ed. 38 (1999) 524
12. Pierson J.F., Wiederkehr D., Chappé J.-M., and Martin N. Appl. Surf. Sci. 253 (2006) 1484
13. Sant S.B., Gill K.S., and Burrell R.E. Scripta Mater. 41 (1999) 1333
14. Dannenberg R., Stach E., Groza J.R., and Dresser B.J. Thin Solid Films 379 (2000) 133
15. Ayyub P., Chandra R., Taneja P., Sharma A.K., and Pinto R. Appl. Phys. A 73 (2001) 67
16. Taneja P., Chandra R., Banerjee R., and Ayyub P. Scripta Mater. 44 (2001) 1915
17. Pierson J.F., Wiederkehr D., and Billard A. Thin Solid Films 478 (2005) 196
18. Pierson J.F., Duverger E., and Banakh O. J. Solid State Chem. 180 (2007) 968
19. Lu Y., Zhang H., and Liu F. Phys. Lett. A 342 (2005) 351
20. Dai W.-L., Cao Y., Ren L.-P., Yang X.-L., Xu J.-H., Li H.-X., He H.-Y., and Fan K.-N. J. Catal. 228 (2004) 80
21. Balkanski M., Petroff Y., and Trivich D. Solid State Commun. 5 (1967) 85