Ultrasonic micromotors

Ultrasonics Symposium Proceedings

Volumn 2, Issue , 1989, Pages 745-748

  Moroney, R M ^a   White, R M ^a   Howe, R T ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; MEMBRANES; SEMICONDUCTING SILICON; ULTRASONIC TRANSDUCERS;

ENERGY TRANSFER; INTERDIGITAL TRANSDUCER; POLYSILICON BLOCKS; THIN MEMBRANES; TRAVELING FLEXURAL WAVES; ULTRASONIC MICROMOTORS;

ELECTRIC MOTORS;

EID: 0024872083     PISSN: 00905607     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)