Ion bombardment induced interface broadening in Co/Cu system as a function of layer thickness

Applied Surface Science

Volumn 242, Issue 3-4, 2005, Pages 375-379

  Barna, A ^a   Menyhard, M ^a   Zalar, A ^b   Panjan, P ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

AES depth profiling; Co Cu system; Ion bombardment induced interface broadening; Thin film analysis; TRIM simulation

Indexed keywords

COBALT; COPPER; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS;

ES DEPTH PROFILING; ION-SOLID INTERACTION; THIN FILM ANALYSIS; TRIM SIMULATION;

ION BOMBARDMENT;

EID: 13444301319     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.09.002     Document Type: Article

References (16)

1. A. Barna Mater. Res. Soc. Symp. Proc. 254 1992 3
2. M.A. Makeev, R. Cuerno, and A.L. Barabasi Nucl. Instrum. Methods B 197 2002 185
3. G. Carter Vacuum 49 1998 285
4. S. Hofmann D. Briggs M.P. Seah Practical Surface Analysis, Auger and X-ray Photoelectron Spectroscopy, second ed. vol. 1 1990 John Wiley & Sons Chichester 143 200
5. A. Zalar Thin Solid Films 124 1985 223
6. A. Barna, A. Sulyok, and M. Menyhard Surf. Interface Anal. 19 1992 77
7. A. Barna, M. Menyhard, G. Zsolt, A. Koos, A. Zalar, and P. Panjan J. Vac. Sci. Technol. A 21 2003 553
8. A. Barna, M. Menyhard, G. Zsolt, N.Q. Khanh, A. Zalar, and P. Panjan J. Vac. Sci. Technol. A 21 2003 196
9. A. Barna, and M. Menyhard Phys. Status Solidi A 145 1994 263
10. TELETWIN ion gun is the product of Technoorg Linda (Budapest), patent No. PCT/HU96/00054.
11. R. Shimizu Jpn. J. Appl. Phys. 22 1983 1631
12. S. Tanuma, C.J. Powell, and D.R. Penn Surf. Interface Anal. 21 1994 165
13. W. Möller, M. Posselt, Forschungzentrum Rossendorf, 01314 Dresden, Germany, TRIDYN_FZR, FZR-317.
14. M. Menyhard, A. Sulyok, K. Pentek, and A.M. Zeltser Thin Solid Films 366 2000 129
15. Z. Csahok, Z. Farkas, M. Menyhard, G. Gergely, and C.S. Daroczi Surf. Sci. Lett. 364 1996 L600
16. M. Menyhard Surf. Interface Anal. 26 1998 1001