Interface broadening due to Ar+ ion bombardment measured on Co/Cu multilayer at grazing angle of incidence

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 3, 2003, Pages 553-557

  Barna, A ^a   Menyhard, M ^a   Zsolt, G ^a   Koos, A ^a   Zalar, A ^b   Panjan, P ^c  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

^c JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; COBALT; COMPUTER SIMULATION; COPPER; INTERFACES (MATERIALS); ION BOMBARDMENT; PHASE TRANSITIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTER DEPOSITION; THICKNESS MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY;

GRAZING ANGLE OF INCIDENCE; INTERFACE BROADENING; ION MILLING;

MULTILAYERS;

EID: 0037599302     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1559921     Document Type: Article

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