SnO2 thin films from metalorganic precursors: Synthesis, characterization, microelectronic processing and gas-sensing properties

Sensors and Actuators, B: Chemical

Volumn 124, Issue 1, 2007, Pages 217-226

  Epifani, Mauro ^a   Francioso, Luca ^a   Siciliano, Pietro ^a   Helwig, Andreas ^b   Mueller, Gerhard ^b   Díaz, Raül ^c   Arbiol, Jordi ^c,d   Morante, Joan R ^c  

^a CNR   (Italy)

^b AIRBUS GROUP INNOVATIONS   (Germany)

^c UNIVERSITY OF BARCELONA   (Spain)

^d UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Chemoresistive sensors; Microelectronic processing; Microstructure; Solution deposition

Indexed keywords

CHEMICAL SENSORS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROELECTRONIC PROCESSING; ORGANOMETALLICS; SPIN COATING; SYNTHESIS (CHEMICAL); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMORESISTIVE SENSORS; COMMERCIAL THICK FILM; SENSING DEVICES; SOLUTION DEPOSITION;

TIN DIOXIDE;

EID: 34249064892     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.12.029     Document Type: Article

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