Optical, structural and electrical properties of tin oxide films prepared by magnetron sputtering

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 76-81

  Karapatnitski, I A ^a   Mit', K A ^a   Mukhamedshina, D M ^a   Beisenkhanov, N B ^a  

^a Ministry of Education and Science of the Republic of Kazakhstan   (Kazakhstan)

Author keywords

Structure; Tin oxide thin film

Indexed keywords

ANNEALING; ARGON; CORUNDUM; ELECTRIC CONDUCTIVITY; OPTICAL CORRELATION; POLYCRYSTALLINE MATERIALS; QUARTZ; SENSORS; THERMAL EFFECTS; TIN COMPOUNDS; TRANSPARENCY;

ARGON-OXYGEN ATMOSPHERES; GAS-SENSITIVE FILMS;

THIN FILMS;

CHEMICAL STRUCTURE; ELECTRICAL PROPERTY; FILM; OPTICAL FEATURE; SPUTTERING; TIN OXIDE;

EID: 0036496031     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01611-5     Document Type: Article

References (8)