SCOPUS 정보 검색 플랫폼

Volumn 527-529, Issue PART 1, 2006, Pages 67-70

Growth and surface morphologies of 6H SiC bulk and epitaxial crystals

Author keywords

Chemical vapor deposition; Crystal growth; CVD; Dislocations; Etching; Micropipes; Physical vapor transport; PVT; Vapor growth; X ray topography

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DISLOCATIONS (CRYSTALS); EPITAXIAL LAYERS; ETCHING; SILICON CARBIDE; SURFACE MORPHOLOGY;

MICROPIPES; PHYSICAL VAPOR TRANSPORT; VAPOR GROWTH; X RAY TOPOGRAPHY;

CRYSTAL GROWTH;

EID: 34249024871 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/0-87849-425-1.67 Document Type: Conference Paper

Times cited : (2)

References (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.