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Volumn 815, Issue , 2004, Pages 27-32
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PVT growth of 6H SiC crystals and defect characterization
a a a a b |
Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CRYSTAL DEFECTS;
CRYSTAL GROWTH;
ELECTRIC FIELDS;
ETCHING;
GRAPHITE;
GROWTH KINETICS;
HYDROGEN;
MATHEMATICAL MODELS;
NUCLEATION;
SEMICONDUCTOR MATERIALS;
SINGLE CRYSTALS;
SUBLIMATION;
DEFECT FORMATION;
GROWTH PROCESSES;
PHYSICAL VAPOR TRANSPORT (PVT);
SYNCHROTRON WHITE BEAM X-RAY TOPOGRAPHY (SWBXT);
SILICON CARBIDE;
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EID: 12844264839
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-815-j5.31 Document Type: Conference Paper |
Times cited : (4)
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References (10)
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