Focused-ion-beam fabrication of slanted grating couplers in silicon-on-insulator waveguides

IEEE Photonics Technology Letters

Volumn 19, Issue 11, 2007, Pages 816-818

  Schrauwen, Jonathan ^a   Van Laere, Frederik ^a   Van Thourhout, Dries ^a   Baets, Roel ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Fiber coupler; Focused ion beam (FIB); Slanted grating coupler

Indexed keywords

ETCHING; GRAFTING (CHEMICAL); ION BEAMS; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; OPTICAL WAVEGUIDES;

FIBER COUPLER; FOCUSED-ION-BEAM (FIB); SLANTED GRATING COUPLER;

SILICON ON INSULATOR TECHNOLOGY;

EID: 34249017276     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2007.897293     Document Type: Article

References (10)

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