High efficiency Silicon-on-Insulator grating coupler based on a poly-Silicon overlay

Optics Express

Volumn 14, Issue 24, 2006, Pages 11622-11630

  Roelkens, Günther ^a   Van Thourhout, Dries ^a   Baets, Roel ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CMOS INTEGRATED CIRCUITS; DIFFRACTION GRATINGS; OPTICAL WAVEGUIDES; SILICON ON INSULATOR TECHNOLOGY;

BROADBAND GRATING COUPLERS; GRATING ETCHING; GRATING STRUCTURE; POLYSILICON OVERLAY;

OPTICAL FIBER COUPLING;

EID: 34247236923     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.011622     Document Type: Article

References (10)

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