Microfabricated 3-D polymeric structure with SU-8

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6462, Issue , 2007, Pages

  Yi, Shin Wook ^a   Kong, Hong Jin ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Femtosecond laser; Nano fabrication; Stereolithography; SU 8; Two photon absorption

Indexed keywords

LIGHT ABSORPTION; MEMS; MICROFLUIDICS; NANOSTRUCTURES; PHOTOPOLYMERIZATION; STEREOLITHOGRAPHY; ULTRASHORT PULSES;

LASER OUTPUT POWER; POLYMERIC STRUCTURE; PROTON ACID GENERATORS; TWO PHOTON ABSORPTION POLYMERIZATION (TPAP);

ORGANIC POLYMERS;

EID: 34248675518     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.700367     Document Type: Conference Paper

References (9)

1. S. Kawata, H.-B. Sun, T. Tanaka and K. Takada, "Finer features for functional microdevices - Micromachines can be created with higher resolution using two-photon absorption" Nature, 412, 697-698 (2001)
2. J. Serbin, A. Egbert et al., "Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics" Opt. Lett. 28(5), 301-303 (2003)
3. S. W. Yi, S. Lee, H. kong, D. Yang, S. Park, T. Lim, R. H. Kim, K-S. Lee, "Three-dimensional microfabrication using two-photon absorption by femtosecond laser" Proc. SPIE, 5342, 137-145 (2004)
4. S. W. Yi, S. K. Lee, H. J. Kong, et al., "Fabrication of 3D microstructure and analysis of voxel generation by ultrafast-laser-induced two-photon absorption" Proc. SPIE, 5715, 118-129 (2005)
5. G. Hong, A. S. Holmes, M. E. Heaton, "SU8 resist plasma etching and its optimization" Microsys. Tech. Micro & Nano Sys. Info. Storage and Proc. Sys., 10(5), 357-359 (2004)
6. Brian H. Cumpston, et al., "Two-Photon polymerization initiators for three-dimensional optical data storage and microfabrication" , Nature, 398, 51-54 (1999)
7. H-K. Yang, K-S. Lee, H-B. Sun, S. Kawata, et al, "Recent progress of lithographic micro fabrication by the TPA-induced photopolymerization", J. Photopolymer Sci. & Tech., 17(3), 385-392 (2004)
8. K. K. Seet, V. M. S. Matsuo, et. al, "Three-Dimensional Spiral-Architecture Photonic Crystals Obtained By Direct Laser Writing", Adv. Mater., 17(5), 541-545 (2005)
9. H-B Sun, M. Maeda, K. Tanaka, J. W. M. Chon, and S. Kawata, "Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization" App, Phy. Lett. 83 (5), 819-821 (2003)