Three-Dimensional Micro-Fabrication using Two-Photon Absorption by Femtosecond Laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5342, Issue , 2004, Pages 137-145

  Yi, Shin Wook ^a   Lee, Seong Ku ^a   Kong, Hong Jin ^a   Yang, Dong Yol ^a   Park, Sang Hu ^a   Lim, Tae Woo ^a   Kim, Ran Hee ^b   Lee, Kwang Sup ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Hannam University   (South Korea)

Author keywords

Femotosecond laser; Microfabrication; PDMS; Stereo lithography; Two photon absorption

Indexed keywords

HIGH POWER LASERS; LASER MODE LOCKING; LIGHT ABSORPTION; PHOTONS; PHOTOPOLYMERIZATION; RESINS; SOLID STATE LASERS;

FEMTOSECOND LASERS; MICROFABRICATION; PDMS; STEREOLITHOGRAPHY; TWO PHOTON ABSORPTION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 2142752703     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524310     Document Type: Conference Paper

References (14)

1. S. Maruo and S. Kawata, "Two-Photon-Absorbed Near-Infrared Photopolymerization for Three-Dimensional microfabrication", J. Micro Electro Mechanical Systems, 7, 411-415, 1998
2. S. Maruo, O. Nakamura, and S. Kawata, "Three-dimensional microfabrication with two photon-absorbed photopolymerization", Opt. Lett., 22, 132-134, 1997
3. S. Kawata, H.-B. Sun, T. Tanaka and K. Takada, "Fine features for functional devices", Nature, 412, 697-698, 2001
4. A. S. Kewitsch and A. Yariv, "Self-focusing and self-trapping of optical beams upon photopolymerziation", Opt. Lett., 21, 24-26, 1997
5. Strickker, J. H. & Webb, W.W., "Three-dimensional optical storage in refractive media by two-photon point excitation", Opt. Lett., 16, 1780-1782, 1991
6. Parthenopoulos, D.A. & Rentzepis, P. M., "3-Dimensional optical storage memory", Science, 245, 843-845, 1989
7. T. Tanaka, H.-B. Sun and S. Kawata, "Rapid sb-diffraction-limit laser micro/nanoprocessing in a threshold material system", App. Phy. Lett., 80, 312-314, 2002
8. Duffy D. C., McDonald J. C., Schueller O. J. A. and Whitesides G. M., "Fabrication of microfluidic systems in poly(dimethylsiloxane)", Anal. Chem., 70, 4974-4984, 1998
9. Brian H. Cumpston, et al., "Two-Photon polymerization initiators for three-dimensional optical data storage and microfabrication", Nature, 398, 51-54, 1999
10. H.-K. Yang, K.-S. Lee, M. Blanchard-Desce, H. B. Sun, and S. Kawata (unpublished)
11. J. Serbin, A. Egbert, et al., "Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics", Opt. Lett. 28, 301-303, 2003
12. Amnon Yariv, Optical Electronics in Modern Communications, 50-56, Oxford University Press, New York, 1997
13. Denk W., Strickler, J. H. & Webb, W.W., "Two-photon laser scanning fluorescence microscopy", Science, 248, 73-76, 1990
14. Duffy D. C., Schueller O. J. A., Brittain S. T. and Whitesides G. M., "Rapid prototyping of microfluidic switches in poly(dimethyl siloxane) and their actuation by electro-osmotic flow", J. Micromech. Microeng., 9, 211-217, 1999