Three-dimensional diffractive micro- And nano-optical elements fabricated by electron-beam lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6462, Issue , 2007, Pages

  Divliansky, Ivan B ^a   Johnson, Eric G ^b  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b University of North Carolina at Charlotte   (United States)

Author keywords

Analog lithography; Diffractive optics; Electron beam lithography; Grey lithography; Nano optics; Three dimensional nano fabrication

Indexed keywords

ANALOG LITHOGRAPHY; GREY LITHOGRAPHY; NANOOPTICS; PHOTONIC CIRCUITS;

DATA ACQUISITION; DIFFRACTIVE OPTICS; ELECTRON BEAM LITHOGRAPHY; INTEGRATED OPTICS; NANOTECHNOLOGY; THREE DIMENSIONAL;

MICROOPTICS;

EID: 34248661570     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.700999     Document Type: Conference Paper

References (5)

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