Digital holographic microscopy for nanometric quality control of micro-optical components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6475, Issue , 2007, Pages

  Kühn, Jonas ^a   Charrière, Florian ^a   Colomb, Tristan ^a,c   Cuche, Etienne ^b   Emery, Yves ^b   Depeursinge, Christian ^a  

^a EPFL   (Switzerland)

^b Lyncee Tec SA   (Switzerland)

^c DEPT UNIV DE PSYCHIATRIE ADULTE   (Switzerland)

Author keywords

Aberrations; Digital holography; Metrology; Micro lenses; Micro optics; Microscopy

Indexed keywords

ABERRATIONS; ASPECT RATIO; HOLOGRAPHY; MICROLENSES; MICROSCOPIC EXAMINATION; OPTICAL VARIABLES MEASUREMENT; QUALITY CONTROL; WAVEFRONTS;

ABERRATION COEFFICIENTS; DIGITAL HOLOGRAPHY; MICRO-COMPONENTS; WAVEFRONT CORRECTION;

MICROOPTICS;

EID: 34248645973     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.700523     Document Type: Conference Paper

References (15)

1. J. W. Goodman, and R. W. Lawrence, "Digital image formation from electronically detected holograms," Applied Physics Letters 11, 77-79 (1967).
2. O. Coquoz, C. Depeursinge, R. Conde, and F. Taleblou, "Numerical reconstruction of images from endoscopic holograms," in 14th Annual International Conference of the IEEE-EMBS, (IEEE, Paris, 1992), pp. 338-339.
3. U. Schnars, and W. Jüptner, "Direct Recording of Holograms by a Ccd Target and Numerical Reconstruction," Applied Optics 33, 179-181 (1994).
4. D. Gabor, "A New Microscopic Principle," Nature 161, 777-778 (1948).
5. U. Schnars, "Direct phase determination in hologram interferometry with use of digitally recorded holograms," J. Opt. Soc. Am. A 11, 2011-2015 (1994).
6. E. Cuche, F. Bevilacqua, and C. Depeursinge, "Digital holography for quantitative phase-contrast imaging," Optics Letters 24, 291-293 (1999).
7. E. Cuche, P. Marquet, and C. Depeursinge, "Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms," Applied Optics 38, 6994-7001 (1999).
8. P. Marquet, B. Rappaz, P. J. Magistretti, E. Cuche, Y. Emery, T. Colomb, and C. Depeursinge, "Digital holographic microscopy: a noninvasive contrast imaging technique allowing quantitative visualization of living cells with subwavelength axial accuracy," Optics Letters 30, 468-470 (2005).
9. G. Coppola, M. Iodice, A. Finizio, S. D. Nicola, G. Pierattini, P. Ferraro, C. Magro, and G. E. Spoto, "Digital holography microscope as tool for microelectromechanical systems characterization and design," Journal of Microlithography, Microfabrication, and Microsystems 4, 013012 (2005).
10. Y. Emery, E. Cuche, F. Marquet, N. Aspert, P. Marquet, J. Kühn, M. Botkine, T. Colomb, F. Montfort, F. Charrière, C. Depeursinge, P. Debergh, and R. Conde, "Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS - art. no. 61860N," in Mems, Moems, and Mcromachining II, H. Urey, and A. ElFatatry, eds. (Spie-Int Society Optical Engineering, Bellingham, 2006), pp. N1860-N1860.
11. T. Colomb, P. Dahlgren, D. Beghuin, E. Cuche, P. Marquet, and C. Depeursinge, "Polarization imaging by use of digital holography," Applied Optics 41, 27-37 (2002).
12. M. K. Kim, "Tomographic three-dimensional imaging of a biological specimen using wavelength-scanning digital interference holography," Optics Express 7, 305-310 (2000).
13. F. Montfort, T. Colomb, F. Charrière, J. Kühn, P. Marquet, E. Cuche, S. Herminjard, and C. Depeursinge, "Submicrometer optical tomography by multiple-wavelength digital holographic microscopy," Applied Optics 45, 8209-8217 (2006).
14. T. Colomb, E. Cuche, F. Charrière, J. Kühn, N. Aspert, F. Montfort, P. Marquet, and C. Depeursinge, "Automatic procedure for aberration compensation in digital holographic microscopy and applications to specimen shape compensation," Applied Optics 45, 851-863 (2006).
15. T. Colomb, F. Montfort, J. Kühn, N. Aspert, E. Cuche, A. Marian, F. Charrière, S. Bourquin, P. Marquet, and C. Depeursinge, "Numerical parametric lens for shifting, magnification and complete aberration compensation in digital holographic microscopy," Journal of the Optical Society of America A-Optics Image Science and Vision 23, 3177-3190 (2006).