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Volumn 90, Issue 17, 2007, Pages

Submicron mapping of strained silicon-on-insulator features induced by shallow-trench-isolation structures

Author keywords

[No Author keywords available]

Indexed keywords

CONFORMAL MAPPING; EIGENVALUES AND EIGENFUNCTIONS; INCLUSIONS; INTERFACES (MATERIALS); STRAIN; X RAY DIFFRACTION;

SHALLOW TRENCH ISOLATION (STI); STRAIN DISTRIBUTIONS; STRAIN MAPPING; X-RAY MICROBEAM DIFFRACTION;

SILICON ON INSULATOR TECHNOLOGY;

EID: 34248583051 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2732180 Document Type: Article

Times cited : (14)

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