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Volumn 22, Issue 12, 2007, Pages 2786-2789
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One step processing of aminofunctionalized gate oxides
a
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Author keywords
Bio FETs; Functionalization; Gate oxides; PE CVD; Silica
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Indexed keywords
ARGON;
BIOMOLECULES;
CELL IMMOBILIZATION;
EVAPORATION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
LOW TEMPERATURE EFFECTS;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SURFACE PROPERTIES;
ALDEHYDES;
BIOSENSORS;
CONTACT ANGLE;
ELECTRIC DISCHARGES;
FLUORESCENCE MICROSCOPY;
FUSED SILICA;
GATES (TRANSISTOR);
GROWTH (MATERIALS);
INFRARED SPECTROSCOPY;
PERMEATION;
PHASE TRANSITIONS;
SILICA;
SILICON COMPOUNDS;
ULTRAVIOLET SPECTROSCOPY;
ULTRAVIOLET VISIBLE SPECTROSCOPY;
BIOMOLECULAR IMMOBILIZATION;
DYNAMIC POWER;
FUNCTIONALIZATION;
GATE OXIDES;
INTERNAL CAPILLARY NETWORKS;
MOLECULAR FRAGMENTATION;
PLASMA DISCHARGES;
BIOSENSORS;
SURFACES;
AMINE;
OXIDE;
SILICON DIOXIDE;
ARTICLE;
BIOSENSOR;
EVALUATION;
EVAPORATION;
FLUORESCENCE MICROSCOPY;
INFRARED SPECTROSCOPY;
LOW TEMPERATURE;
MEMBRANE PERMEABILITY;
MOLECULAR DYNAMICS;
ROOM TEMPERATURE;
SURFACE PROPERTY;
BIOSENSING TECHNIQUES;
SILANES;
SILICON DIOXIDE;
SPECTROSCOPY, FOURIER TRANSFORM INFRARED;
TRANSISTORS;
BIO-FETS;
BIOMOLECULAR IMMOBILIZATION;
CAPILLARY NETWORK;
DYNAMIC POWER;
ELASTIC RECOIL DETECTION ANALYSIS;
FLOW CONDITION;
FOURIER TRANSFORMED INFRARED SPECTROSCOPY;
FTIR;
FUNCTIONALIZATIONS;
FUSED SILICA SUBSTRATES;
GATE OXIDE;
HIGH-POWER;
LOW TEMPERATURES;
MOLECULAR FRAGMENTATION;
NITROBENZALDEHYDE;
ONE STEP;
ORGANIC PHASIS;
ORGANIC-INORGANIC STRUCTURES;
PLASMA CONDITIONS;
PLASMA DISCHARGE;
POLAR COMPONENTS;
PROCESSING CONDITION;
ROOM TEMPERATURE;
SI(1 0 0);
SURFACE FREE ENERGY;
TRIETHOXYSILANE;
UV-VIS SPECTROSCOPY;
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EID: 34248578205
PISSN: 09565663
EISSN: None
Source Type: Journal
DOI: 10.1016/j.bios.2006.10.039 Document Type: Article |
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Times cited : (22)
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References (16)
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