Microstructure and optical characterization of magnetron sputtered NbN thin films

Chinese Journal of Aeronautics

Volumn 20, Issue 2, 2007, Pages 140-144

  Du, Xin Kang ^a,b   Wang, Tian Min ^a   Wang, Cong ^a   Chen, Bu Liang ^c   Zhou, Long ^a  

^a BEIHANG UNIVERSITY   (China)

^b MECHANICAL ENGINEERING COLLEGE   (China)

^c Academy of Space Technology   (China)

Author keywords

Microstructure; NbN thin film; Optical properties; Reactive magnetron sputtering

Indexed keywords

MAGNETRON SPUTTERING; MICROSTRUCTURE; NIOBIUM COMPOUNDS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

NANOMETERS; NBN THIN FILMS; REACTIVE MAGNETRON SPUTTERING; ULTRAFINE GRANULAR FILMS;

THIN FILMS;

EID: 34248506581     PISSN: 10009361     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1000-9361(07)60021-1     Document Type: Article

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