Advances in laser processing of microelectronics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6451, Issue , 2007, Pages

  Baird, B W ^a   Hainsey, R F ^a   Peng, X ^a   Pirogovsky, P Y ^a  

^a Electro Scientific Industries Inc   (United States)

Author keywords

Laser memory repair; Microvia drilling. Laser processing; Solar cells

Indexed keywords

INTEGRATED CIRCUIT LAYOUT; LASER APPLICATIONS; MICROELECTRONICS; PRINTED CIRCUIT BOARDS; SEMICONDUCTOR DEVICES; SOLID STATE LASERS;

INTEGRATED CIRCUIT PACKAGES; LASER MEMORY REPAIR; MICROVIA DRILLING;

SOLAR CELLS;

EID: 34248402111     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.713213     Document Type: Conference Paper

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