Ultraviolet laser repair of advanced semiconductor memory devices

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 2001, Pages 230-

  Baird, B W ^a   Nilsen, B E ^a   Hainsey, R F ^a   Ho Wai Lo, ^a  

^a Electro Scientific Industries Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RANDOM ACCESS STORAGE; HARMONIC GENERATION; LASER PULSES; Q SWITCHED LASERS; SCANNING ELECTRON MICROSCOPY; STATIC RANDOM ACCESS STORAGE; ULTRAVIOLET DEVICES; ULTRAVIOLET RADIATION;

SEMICONDUCTOR MEMORY DEVICES; ULTRAVIOLET LASERS;

SEMICONDUCTOR STORAGE;

EID: 0034801058     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/cleo.2001.947741     Document Type: Conference Paper

References (2)

1. Electrical characteristics of CVD interconnects and vias
2. Dual damascene interconnect of copper and low permittivity dielectric for high performance integrated circuits