Laser material processing in microelectronics manufacturing: Status and near-term opportunities

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5713, Issue , 2005, Pages 200-214

  Dunsky, Corey M ^a  

^a Research and Development Department   (United States)

Author keywords

Flat panel display manufacturing; Laser materials processing; Lasers; Microelectronics manufacturing; Semiconductor; Silicon laser micromachining

Indexed keywords

CARBON DIOXIDE LASERS; DATA PROCESSING; INTEGRATED CIRCUITS; LAPTOP COMPUTERS; LIGHT EMITTING DIODES; MICROELECTRONICS; MICROMACHINING; MICROPROCESSOR CHIPS; NATURAL FREQUENCIES; PRINTED CIRCUIT BOARDS; SEMICONDUCTOR MATERIALS;

FLAT PANEL DISPLAY MANUFACTURING; LASER MATERIALS PROCESSING; MICROELECTRONICS MANUFACTURING; SILICON LASER MICROMACHINING;

MICROELECTRONIC PROCESSING;

EID: 23644432997     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600913     Document Type: Conference Paper

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