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Volumn 40, Issue 1, 2007, Pages 1-5
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Study on effects of the feed on AFM-based nano-scratching process using MD simulation
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Author keywords
Atomic force microscopy; Copper; Diamond; Molecular dynamics; Nanopatterning
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COMPUTER SIMULATION;
DEFORMATION;
MICROFABRICATION;
MOLECULAR DYNAMICS;
POTENTIAL ENERGY;
DIAMOND TIPS;
INTERACTIVE FORCES;
MOLECULAR DYNAMIC (MD) SIMULATION;
NANOPATTERNING;
NANOELECTRONICS;
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EID: 34248343758
PISSN: 09270256
EISSN: None
Source Type: Journal
DOI: 10.1016/j.commatsci.2006.10.020 Document Type: Article |
Times cited : (42)
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References (18)
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