Numerical investigation of the parameter dependences of nanolithography by using micro-structured metal grating

Journal of Optics A: Pure and Applied Optics

Volumn 9, Issue 5, 2007, Pages

  Zhao, Peng ^a   Wang, Yan Hua ^a   Zhang, Yan ^a  

^a CAPITAL NORMAL UNIVERSITY   (China)

Author keywords

Finite difference time domain method; Nanolithography; Surface plasmons

Indexed keywords

DIFFRACTION GRATINGS; ELECTRIC FIELD MEASUREMENT; FINITE DIFFERENCE TIME DOMAIN METHOD; NANOLITHOGRAPHY; PARAMETER ESTIMATION; SURFACE PLASMON RESONANCE;

MICRO STRUCTURED METAL GRATING; TRANSMITTED FIELD DISTRIBUTION;

MICROSTRUCTURE;

ELECTRIC FIELDS; GROOVES; LITHOGRAPHY; MICROSTRUCTURE; PARAMETERS; SLITS;

EID: 34248215849     PISSN: 14644258     EISSN: 17413567     Source Type: Journal    
DOI: 10.1088/1464-4258/9/5/015     Document Type: Article

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