Planer fabrication of multilayer piezoelectric actuator by groove cutting and electroplating

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 46-51

  Suzuki, Gaku ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; ETCHING; LASER ABLATION; MICROACTUATORS; MULTILAYERS; PIEZOELECTRIC DEVICES;

LASER ASSISTED ETCHING (LAE); MULTILAYER PIEZOELECTRIC ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033707029     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)