Enhancement of H2-sensing properties of F-doped SnO2 sensor by surface modification with SiO2

Sensors

Volumn 6, Issue 5, 2006, Pages 492-502

  Han, Chi Hwan ^a   Han, Sang Do ^a   Khatkar, S P ^b  

^a Korea Institute of Energy Research (KIER)   (South Korea)

^b MAHARSHI DAYANAND UNIVERSITY   (India)

Author keywords

MEMS technology; Sodium silicate; Surface modification

Indexed keywords

CHEMICAL DETECTION; CHEMICAL MODIFICATION; CHEMICAL SENSORS; FLUORINE; GAS DETECTORS; MEMS; MICROSENSORS; SILICATES; SILICON COMPOUNDS; SODIUM;

ENHANCED SENSITIVITY; GAS SENSING PROPERTIES; MEMS TECHNOLOGY; MICRO ELECTROMECHANICAL SYSTEM (MEMS); SENSING PROPERTY; SODIUM SILICATE; SURFACE CHEMICAL MODIFICATIONS; SURFACE-MODIFIED;

SURFACE TREATMENT;

EID: 34248187604     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s6050492     Document Type: Article

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