On the application of the BGK kinetic model to the analysis of gas-structure interactions in MEMS

Computers and Structures

Volumn 85, Issue 11-14, 2007, Pages 810-817

  Frangi, A ^a   Frezzotti, A ^a   Lorenzani, S ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

BGK model; Boltzmann equation; Damping; Gas flow; MEMS; Silicon

Indexed keywords

BOLTZMANN EQUATION; DAMPING; FLOW OF GASES; KINETIC THEORY; PERTURBATION TECHNIQUES; SILICON;

BGK MODELS; SILICON INERTIAL MEMS; SUSPENDED SHUTTLE;

MEMS;

EID: 34248172514     PISSN: 00457949     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.compstruc.2007.01.011     Document Type: Article

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